Probing System and Related Technologies
(1)New Probing System
・A new floating probe is developed, in which no net current is drawn from plasma. Parameters of isolated plasma can be measured within 0.5 second.
Example of Plasma Measurement (pdf)
Technical Paper 1: A new emissive-probe method for electron temperature measurement in radio-frequency plasmas (See Paper Publications)
Technical Paper 2: A New Floating-Probe for Measurement of Insulated Plasma Produced by Radio-Frequency Power (See Paper Publications)
(2)Technical Supports in Plasma Measurements
・Contents: We provide you our technical supports in measurements of various plasmas by several probe methods including our new floating probe. Please contact us with any consultings.